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MEMS and NEMS :systems devices and structures

Lyshevshi , S. E.

MEMS and NEMS :systems devices and structures [Text] Sergey Edward Lyshevshi - Boca Raton CRC Press 2010 - 461p; 25cm.

index included

ISBN: 9780849312625 0.00

Subjects--Topical Terms:
Microelectromechanical Systems

Index Terms--Curriculum Objective:
Electronic Communication

Dewey Class. No.: 621.381 / LYS/M

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