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Principles and Applications of NanoMEMS Physics

De Los Santos, Hector J.

Principles and Applications of NanoMEMS Physics [Text] Hector J. De Los Santos - New Delhi Springer 2008 - 254p. ; 23cm. - Microsystems .

ISBN: 9788181288530 0.00

Subjects--Topical Terms:
Nanoelectronics

Index Terms--Curriculum Objective:
Nano Science

Dewey Class. No.: 621.381 / DEL/P

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