TY  - BOOK
AU  - Zant, Peter Van
TI  - Microchip Fabrication: a practical guide to semiconductor processing  
SN  - 9780071432412
U1  - 621.38152 
PY  - 2004///
CY  - New York
PB  - Mc Graw-Hill
KW  - Microcomputer engineering
KW  - Microchip Processing
KW  - ME
N1  - Includes Glossary and Index
ER  -