TY  - BOOK
TI  - MOEMS : micro -opto-electro-mechanical systems
SN  - 9788122428339
U1  - 621.3 
PY  - 2010///
CY  - New Delhi
PB  - New Age Internatinal
KW  - Microelectromechanical Systems
KW  - ME
N1  - index included
ER  -