TY  - BOOK
AU  - De Los Santos, Hector J.
TI  - Principles and Applications of NanoMEMS Physics
SN  - 9788181288530
U1  - 621.381 
PY  - 2008///
CY  - New Delhi
PB  - Springer
KW  - Nanoelectronics
KW  - Nano Science
ER  -