000 00423nam a2200145Ia 4500
020 _a9788122428339
_c0.00
082 _a621.3
_bMOE
245 _aMOEMS : micro -opto-electro-mechanical systems
_cedited by Manouchehr Motamedi
_h[Text]
260 _aNew Delhi
_bNew Age Internatinal
_c2010
300 _a614p; 24cm.
500 _aindex included
650 _aMicroelectromechanical Systems
658 _aME
041 _aEnglish
999 _c12943
_d12943